1. The principle and structure of the cryogenic vacuum pump
Cryogenic vacuum pump is a vacuum pump that uses a low-temperature surface below 20K to condense and adsorb gas, also known as cold pump and condensate pump, which generally uses cryogenic liquid (liquid nitrogen or liquid helium) or cryogenic refrigerator as the cold source.
2. What are the application fields of cryogenic vacuum pumps?
Cryogenic pumps are suitable for applications that require high vacuum, especially in applications that require clean, oil-free or fast pumping, such as semiconductor and integrated circuit pre-processing, optical coating, solar panels, optoelectronic and vacuum electronics manufacturing, flat panel display device coating, etc.
3. The principle and structure of cryogenic vacuum pump
The cryogenic vacuum pump is mainly composed of pump casing, baffle and cold screen, cold head, secondary cold plate, etc., and its principle of action is: relying on the cold energy provided by the cold source to make the surface gas be cooled to low temperature condensation when the pressure drops, and the non-condensable gas is adsorbed by the solid adsorbent at low temperature, so as to achieve the effect of exhaust and obtain a clean vacuum, the main role of low temperature pumping is low temperature condensation, low temperature adsorption and low temperature capture.
4. the advantages of cryogenic vacuum pumps
1. High ultimate vacuum
The ultimate vacuum of a standard cryogenic vacuum pump can reach 10-7Pa, and if necessary, it can also achieve 10-9Pa without other auxiliary pumps, and theoretically, even reach an extremely high vacuum of more than 10-11Pa.
2. Large pumping speed
The pumping speed of the cryogenic vacuum pump is fast, especially for water, which is much higher than that of other vacuum pumps
